Blankmask with backside conductive layer, and photomask manufactured with the same

A photomask and a blankmask are provided. The blankmask includes a conductive layer attached to a backside of a substrate, and the conductive layer includes a first layer, a second layer, and a third layer that are sequentially stacked on the backside of the substrate. The first layer and the third...

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Hauptverfasser: YANG, CHUL-KYU, KONG, GIL-WOO, SEO, GYEONG-WON
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A photomask and a blankmask are provided. The blankmask includes a conductive layer attached to a backside of a substrate, and the conductive layer includes a first layer, a second layer, and a third layer that are sequentially stacked on the backside of the substrate. The first layer and the third layer are made of a material that contains chromium (Cr) and oxygen (O), and the second layer is made of a material that does not contain the oxygen (O) but contains the chromium (Cr). There is provided the blankmask with the conductive layer having characteristics of low sheet resistance, high adhesion to the substrate, and low stress applied to the substrate.