Substrate processing apparatus and substrate conveyance method

The present invention provides a substrate processing apparatus and a substrate conveyance method. A second conveyance mechanism (23) of a substrate processing apparatus (100) includes a fist non-sharing hand (H_F), a second non-sharing hand (H_S), and M sharing hands (H_1 to H_M). In a first convey...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KIKUMOTO, NORIYUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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