Substrate processing apparatus and substrate conveyance method

The present invention provides a substrate processing apparatus and a substrate conveyance method. A second conveyance mechanism (23) of a substrate processing apparatus (100) includes a fist non-sharing hand (H_F), a second non-sharing hand (H_S), and M sharing hands (H_1 to H_M). In a first conveyance cycle, the M sharing hands (H_1 to H_M) support a substrate (W) yet to be processed and a processed substrate (W) at different timings. In the first conveyance cycle, the first non-sharing hand (H_F) supports only a substrate (W) yet to be processed. In the first conveyance cycle, the second non-sharing hand (H_S) supports only a processed substrate (W). In a state in which the second conveyance mechanism (23) receives N substrates (W) from a substrate placement section (29), the second sharing hand (H_S) does not support the substrates (W) while the M sharing hands (H_1 to H_M) and the first non-sharing hand (H_F) support the substrates (W).