Conveyance device and analysis system

Conveyance device and analysis system

Provided is a technique by which sample observation throughput can be reduced. A conveyance device 2 is equipped with: a holder 24 for holding a mesh MS on which a sample to be analyzed using a charged particle ray device 3 is mounted; a positional information acquisition function for acquiring firs...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: KOBAYASHI, NAOFUMI, NOMAGUCHI, TSUNENORI, NISHINAKA, KENICHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHAMBERS PROVIDED WITH MANIPULATION DEVICES
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
HAND TOOLS
MANIPULATORS
PERFORMING OPERATIONS
PORTABLE POWER-DRIVEN TOOLS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:Provided is a technique by which sample observation throughput can be reduced. A conveyance device 2 is equipped with: a holder 24 for holding a mesh MS on which a sample to be analyzed using a charged particle ray device 3 is mounted; a positional information acquisition function for acquiring first information indicating a positional relation between the mesh MS and the holder 24; and a positional information output function for outputting the first information to the charged particle ray device 3.