Element array pressurizing device, manufacturing device, and manufacturing method
To provide an element array pressurizing device that can stabilize an element array that can be manufactured on a mounting substrate. An element array pressurizing device 10 has a pressurizing plate 11 having a pressurizing unit 12 that pressurizes an element array 40 comprising a plurality of eleme...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | To provide an element array pressurizing device that can stabilize an element array that can be manufactured on a mounting substrate. An element array pressurizing device 10 has a pressurizing plate 11 having a pressurizing unit 12 that pressurizes an element array 40 comprising a plurality of elements 40a-40c disposed on a mounting substrate 30. The pressurizing unit 12 has a plate-shaped hard material 13 for which a surface precision is higher than that of a surface of the pressurizing plate 11. |
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