Element array pressurizing device, manufacturing device, and manufacturing method

To provide an element array pressurizing device that can stabilize an element array that can be manufactured on a mounting substrate. An element array pressurizing device 10 has a pressurizing plate 11 having a pressurizing unit 12 that pressurizes an element array 40 comprising a plurality of eleme...

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Bibliographische Detailangaben
Hauptverfasser: IIZUKA, HIROSHI, KATO, YASUO, YAMASHITA, MAKOTO, SHINDO, RYO, SHINDO, OSAMU, MAKIDA, MITSUYOSHI, SUNAGA, SEIJIRO, KOIZUMI, HIROSHI, MIYAGOSHI, TOSHINOBU
Format: Patent
Sprache:chi ; eng
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Zusammenfassung:To provide an element array pressurizing device that can stabilize an element array that can be manufactured on a mounting substrate. An element array pressurizing device 10 has a pressurizing plate 11 having a pressurizing unit 12 that pressurizes an element array 40 comprising a plurality of elements 40a-40c disposed on a mounting substrate 30. The pressurizing unit 12 has a plate-shaped hard material 13 for which a surface precision is higher than that of a surface of the pressurizing plate 11.