Pellicle film, pellicle, film, graphene sheet and method for producing same

Provided is a technology which enables the achievement of a pellicle film that is not susceptible to breakage in cases where a force is applied thereto in the thickness direction, while being capable of having light transmit therethrough at a high transmittance. A pellicle film according to the pres...

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Bibliographische Detailangaben
Hauptverfasser:	SEKI, KAZUNORI, KODERA, YUTAKA, TAKADA, NAOYA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CHEMISTRY CINEMATOGRAPHY COMPOUNDS THEREOF ELECTROGRAPHY HOLOGRAPHY INORGANIC CHEMISTRY MATERIALS THEREFOR METALLURGY NON-METALLIC ELEMENTS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	Provided is a technology which enables the achievement of a pellicle film that is not susceptible to breakage in cases where a force is applied thereto in the thickness direction, while being capable of having light transmit therethrough at a high transmittance. A pellicle film according to the present invention is provided with a plurality of layers (120) that are stacked upon each other; and one or more of the plurality of layers (120) are provided with one or more openings (120H) that have a width or diameter within the range of from 10 nm to 500 nm.