Substrate inspection apparatus, substrate inspection method, and substrate processing unit in which the substrate inspection apparatus includes a carrying portion carrying a storage container in which substrates are stored and a sensor holding portion including sensors for inspecting ends of the substrates

The present invention relates to a substrate inspection apparatus, which is capable of inspecting substrates and easily acquiring information of the substrates even in either one of a condition that the shape of a storage container is not standardized or a condition that the shapes of the substrates are square substrates. The substrate inspection apparatus includes: a carrying portion, which carries a storage container for storing multiple substrates arranged in an up-down direction; a sensor holding portion, which is movable up and down relative to the carrying portion; an up-down drive portion, which is operable to have the carrying portion and the sensor holding portion move up and down relative to each other; multiple sensors, which are disposed, in a spaced manner, in the sensor holding portion in a direction intersecting the up-down direction to respectively inspect different portions of ends of the substrates stored in the storage container; and a control portion, which drives the up-down drive portion