Method of inspecting a sample, and multi-electron beam inspection system

A method for inspecting a sample with a multi-electron beam inspection system is described. The method includes: placing the sample on a movable stage extending in an X-Y-plane; generating a plurality of electron beams propagating toward the sample; focusing the plurality of electron beams on the sa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MUELLER, BERNHARD G, NUNAN, PETER
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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