Multifunctional materials for temporary bonding

The materials and methods disclosed can be used for applications such as temporary bond and debond of semiconductor and display substrates. These materials have sufficiently low melt rheologies to be used as a bonding layer and can crosslink/cure to allow for reduction in material flow over long per...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PRENGER, LUKE M, LIU, XIAO, WU, QI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The materials and methods disclosed can be used for applications such as temporary bond and debond of semiconductor and display substrates. These materials have sufficiently low melt rheologies to be used as a bonding layer and can crosslink/cure to allow for reduction in material flow over long periods of time. This class of materials also incorporates the ability to be used as a single-layer system for debonding purposes and typically uses laser debonding for its release mechanism. These materials also allow for solvent cleanability using very mild acidic conditions instead of the typical harsh conditions used on curable layers.