Coating apparatus, coating method, and coating head management system

The invention provides a coating apparatus, a coating method, and a coating head management system. The present invention appropriately manages the state of an application head. A coating apparatus (11) is provided with: a holding table (21) for holding a substrate (70); a coating unit (coating head...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OHDAIRA, NAOKI, MURAI, TOSHINOBU, SHIRAISHI, TAKASHI, KAWASUMI, YUKIHIRO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:The invention provides a coating apparatus, a coating method, and a coating head management system. The present invention appropriately manages the state of an application head. A coating apparatus (11) is provided with: a holding table (21) for holding a substrate (70); a coating unit (coating head member (22)) that coats a coating material on the substrate held by the holding table; and a control unit (50) that performs control such that the coating material is applied to a predetermined region of the substrate by moving the substrate and the coating unit relative to each other. A coating head (31) for coating a coating material on the substrate is detachably mounted on the coating part. The coating head has a storage unit (33) including a first storage area in which unique information of the coating head is stored, and a second storage area in which history information of the coating head is stored. The control unit reads the unique information from the first storage area, and stores the unique information