Ceramic heater and production method for same

An electrostatic chuck heater comprises a resistance heating element 16. The resistance heating element 16 is divided into a plurality of sections S from one end of the resistance heating element 16 to another end. A recessed groove R is provided to the surface of each section S along the longitudin...

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Bibliographische Detailangaben
Hauptverfasser:	AKAO, TAKAYOSHI, HIRATA, NATSUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	An electrostatic chuck heater comprises a resistance heating element 16. The resistance heating element 16 is divided into a plurality of sections S from one end of the resistance heating element 16 to another end. A recessed groove R is provided to the surface of each section S along the longitudinal direction of the resistance heating element 16. Each connecting part between recessed grooves R that are provided to neighboring sections S is provided with a protruding part Rm that extends along the connecting part.