Grinding apparatus

A grinding apparatus includes an ultrasonic cleaning unit. The ultrasonic cleaning unit includes a pair of side walls that surround the inside and the outside of a base and grindstones, a bottom surface that connects the pair of side walls, a jet port that is formed in at least either of the side wa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	HIRAIWA, SUGURU, TAKEDA, NOBORU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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