Grinding apparatus

A grinding apparatus includes an ultrasonic cleaning unit. The ultrasonic cleaning unit includes a pair of side walls that surround the inside and the outside of a base and grindstones, a bottom surface that connects the pair of side walls, a jet port that is formed in at least either of the side wa...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HIRAIWA, SUGURU, TAKEDA, NOBORU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DRESSING OR CONDITIONING OF ABRADING SURFACES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING SEMICONDUCTOR DEVICES TRANSPORTING
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Beschreibung
Zusammenfassung:	A grinding apparatus includes an ultrasonic cleaning unit. The ultrasonic cleaning unit includes a pair of side walls that surround the inside and the outside of a base and grindstones, a bottom surface that connects the pair of side walls, a jet port that is formed in at least either of the side walls or the bottom surface and that jets a cleaning liquid toward at least either of the base or the grindstones, a cleaning liquid supply section that supplies the cleaning liquid to the jet port; an ultrasonic vibrator that applies an ultrasonic wave to the cleaning liquid supplied from the cleaning liquid supply section, and an electric power supply section that applies electric power to the ultrasonic vibrator.