Ion implantation apparatus and mechanical arm

A mechanical arm and an ion implantation apparatus are provided. The mechanical arm includes a first arm, a second arm, a third arm, a vertical arm and a wafer holder. The long axis of the first arm, the second arm and the third arm is perpendicular to the Z axis. The proximal end of the second arm...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LIN, WEING, LIN, CHUNIEH
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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