Probe sheet and manufacturing method for thereof

Provided are a probe sheet and a production method for the probe sheet that make it possible to achieve excellent anisotropy and durability, even for fine-pitch terminals. The present invention comprises: a flexible sheet (10) that has a plurality of through electrodes (12); a first anisotropic cond...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: ISHIMATSU, TOMOYUKI
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided are a probe sheet and a production method for the probe sheet that make it possible to achieve excellent anisotropy and durability, even for fine-pitch terminals. The present invention comprises: a flexible sheet (10) that has a plurality of through electrodes (12); a first anisotropic conductive elastomer layer (20) that is disposed on one side of the flexible sheet (10) and comprises conductive particles (22) that are connected in chains in the thickness direction from the through electrodes 12 to the surface; and a second anisotropic conductive elastomer layer (30) that is disposed on the other side of the flexible sheet (10) and comprises conductive particles (32) that are connected in chains in the thickness direction from the through electrodes (12) to the surface.