Substrate inspection device

This substrate inspection device comprises: a rotary table having a mounting surface; a rotary table support unit; an attraction mechanism including a suction device and a suction path having one end connected to the suction device and another end positioned on the mounting surface, the attraction mechanism attracting a circuit substrate onto the mounting surface by suctioning gas inside the suction path by the suction device; a flow volume detection unit for detecting the flow volume of gas that flows in a portion of the suction path located inside the rotary table support unit; a flow volume determination unit for determining whether the flow volume of the gas detected by the flow volume detection unit is greater than or equal to a predetermined value; a contactless detection unit for contactlessly detecting the state of arrangement of the circuit substrate on the mounting surface; and an inspection unit for inspecting the circuit substrate in accordance with the results of detection by the flow volume dete