Inductively coupled antenna and plasma processing device capable of improving the uniformity of plasma density

To provide an inductively coupled antenna and a plasma processing device for improving the uniformity of plasma density. A rectangular frame-shaped inductively coupled antenna, which forms an induced electric field for generating the plasma in a processing container that performs plasma processing o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	TOJO, TOSHIHIRO, SAITO, HITOSHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide an inductively coupled antenna and a plasma processing device for improving the uniformity of plasma density. A rectangular frame-shaped inductively coupled antenna, which forms an induced electric field for generating the plasma in a processing container that performs plasma processing on a rectangular substrate mounted on a mounting surface of a mounting table, and has an opposing surface facing the mounting surface, is characterized by comprising: a flat surface part, in which four antenna wires are wound by respectively shifting their positions by 90 DEG on the facing surface; and a longitudinal winding part, in which at each end of the aforementioned antenna wire, winding is performed around a winding axis parallel to the aforementioned facing surface and intersecting the corner part of the aforementioned rectangular frame, so as to form a bottom flat surface sharing the aforementioned facing surface while performing longitudinal winding.