Particle beam apparatus
A particle beam apparatus includes: an electromagnet to which each ion beam from a plurality of ion sources having different ion species is capable of being introduced, and from which one of the ion beams is capable of selectively exiting to a device on a downstream side by switching a magnetic fiel...
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| Format: | Patent |
| Sprache: | chi ; eng |
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| Zusammenfassung: | A particle beam apparatus includes: an electromagnet to which each ion beam from a plurality of ion sources having different ion species is capable of being introduced, and from which one of the ion beams is capable of selectively exiting to a device on a downstream side by switching a magnetic field intensity, in which the electromagnet is capable of deflecting the one of the ion beam to be exited to the device on the downstream side toward the device on the downstream side, and is capable of reducing exit of a different type of beam mixed in the ion beam to the device on the downstream side, the different type of beam being different from the one of the ion beam. |
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