Vessel for a radiation source

A vessel for an EUV radiation source, the vessel comprising a first opening for accessing an interior of the vessel, a first access member configured to allow or prevent access to the interior of the vessel through the first opening, a second opening for accessing the interior of the vessel, the sec...

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Bibliographische Detailangaben
Hauptverfasser:	KERSSEMAKERS, SANDER, LEENDERS, MARTINUS HENDRIKUS ANTONIUS, LANSBERGEN, ROBERT GABRIEL MARIA, TEGENBOSCH, HENRICUS GERARDUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS X-RAY TECHNIQUE
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Beschreibung
Zusammenfassung:	A vessel for an EUV radiation source, the vessel comprising a first opening for accessing an interior of the vessel, a first access member configured to allow or prevent access to the interior of the vessel through the first opening, a second opening for accessing the interior of the vessel, the second opening being arranged in the first access member and a second access member arranged on the first access member and configured to allow or prevent access to the interior of the vessel through the second opening.