Ceramic heater and method for manufacturing same

In the present invention, an electrostatic chuck heater is provided with a heating resistor 16 inside a ceramic substrate 12. A groove 17 is provided on the surface of the heating resistor 16 in the longitudinal direction. The side wall surfaces 17a of the groove 17 are inclined with respect to the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	AKAO, TAKAYOSHI, HIRATA, NATSUKI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY LAYERED PRODUCTS LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT ORNON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM LIME, MAGNESIA METALLURGY PERFORMING OPERATIONS REFRACTORIES SEMICONDUCTOR DEVICES SLAG TRANSPORTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	In the present invention, an electrostatic chuck heater is provided with a heating resistor 16 inside a ceramic substrate 12. A groove 17 is provided on the surface of the heating resistor 16 in the longitudinal direction. The side wall surfaces 17a of the groove 17 are inclined with respect to the surface of the ceramic substrate 12. No gaps exist between the side wall surfaces 17a of the groove 17 and the ceramic substrate 12.