Decompression drying device and decompression drying method capable of improving uniformity of decompression drying processing

The object of the present invention is to provide a technology capable of improving uniformity of decompression drying processing. A decompression drying device according to one aspect of the present invention is configured to perform decompression drying processing to dry a liquid on a substrate in a decompression state. The decompression drying device according to an embodiment includes a chamber, a plurality of lift pins and a carrying stage. The chamber accommodates the substrate. Each of the lift pins has a top part in contact with a lower surface of the substrate and a rod part connected to the top part, and can be raised and lowered between a lifting position when the substrate is delivered and a lowering position when the decompression drying processing is performed. The carrying stage has a plurality of insertion holes through which the rod parts are inserted, respectively. The top part has, on at least one part of a top surface thereof, a flat surface that is flush with a top surface of the carrying