Lighting device for proximity exposure device, led unit, proximity exposure device, and exposure method of proximity exposure device

The present invention provides a lighting device capable of using, as a light source part, both a mercury lamp and an LED independently. This lighting device is provided with: a first light source part (30) that uses a mercury lamp (31) as a light source; a fly-eye lens (46) that makes light from th...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	MATSUSHITA, TOMOHISA, MATSUZAKA, MASAAKI, YUKI, TAIGO, YAMAGUCHI, YOICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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