Lighting device for proximity exposure device, led unit, proximity exposure device, and exposure method of proximity exposure device

The present invention provides a lighting device capable of using, as a light source part, both a mercury lamp and an LED independently. This lighting device is provided with: a first light source part (30) that uses a mercury lamp (31) as a light source; a fly-eye lens (46) that makes light from th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MATSUSHITA, TOMOHISA, MATSUZAKA, MASAAKI, YUKI, TAIGO, YAMAGUCHI, YOICHI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	The present invention provides a lighting device capable of using, as a light source part, both a mercury lamp and an LED independently. This lighting device is provided with: a first light source part (30) that uses a mercury lamp (31) as a light source; a fly-eye lens (46) that makes light from the first light source part (30) uniform and emits the light; a plurality of reflecting mirrors (40, 41, 50, 51) that each reflect the light from the first light source part (30); a second light source part (61) that uses a plurality of LED elements (62) as a light source; and an LED unit (60) having a moving mechanism (70) that moves the second light source part (61) between an actuation position AP located on a light path EL of the first light source part (30) and a withdrawal position WP apart from the light path EL of the first light source part (30).