Patterned X-ray emitting target, and X-ray reflectance scatterometry system, X-ray photoelectron spectroscopy system, X-ray fluorescence system and X-ray system comprising said patterned X-ray emitting target

The present invention is intended to provide improved patterned X-ray emitting targets as well as X-ray sources that include patterned X-ray emitting targets as well as X-ray reflectance scatterometry (XRS) systems and also including X-ray photoelectron spectroscopy (XPS) systems and X-ray fluoresce...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SCHUELER, BRUNO W, NEWCOME, BRUCE H, REED, DAVID A
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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