A Full-Field Dynamic Monitor Method for Pellicle Membrane and a Full-Field Dynamic Monitor System

A Full-Field Dynamic Monitor Method for Pellicle Membrane, by applying a wild band signal on a pellicle membrane to be disturbed and received the signal reflected from the pellicle membrane and obtaining a resonance frequency spectrum by transforming the signal. By detecting the pellicle membrane th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	LEE, YUING
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!