A Full-Field Dynamic Monitor Method for Pellicle Membrane and a Full-Field Dynamic Monitor System

A Full-Field Dynamic Monitor Method for Pellicle Membrane and a Full-Field Dynamic Monitor System

A Full-Field Dynamic Monitor Method for Pellicle Membrane, by applying a wild band signal on a pellicle membrane to be disturbed and received the signal reflected from the pellicle membrane and obtaining a resonance frequency spectrum by transforming the signal. By detecting the pellicle membrane th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: LEE, YUING
Format: Patent
Sprache:chi ; eng
Schlagworte:
APPARATUS SPECIALLY ADAPTED THEREFOR
CINEMATOGRAPHY
ELECTROGRAPHY
HOLOGRAPHY
MATERIALS THEREFOR
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
ORIGINALS THEREFOR
PHOTOGRAPHY
PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:A Full-Field Dynamic Monitor Method for Pellicle Membrane, by applying a wild band signal on a pellicle membrane to be disturbed and received the signal reflected from the pellicle membrane and obtaining a resonance frequency spectrum by transforming the signal. By detecting the pellicle membrane through the resonance frequency spectrum, the pellicle membrane can be monitored in all directions to ensure the quality of the protective film. Meanwhile, this invention also provides a Full-Field Dynamic Monitor System.