Memory device and forming method thereof

Various embodiments of the present disclosure are directed towards a metal-ferroelectric- insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/dra...

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Bibliographische Detailangaben
Hauptverfasser: LIN, CHUNG-TE, LAI, SHENGIH
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Various embodiments of the present disclosure are directed towards a metal-ferroelectric- insulator-semiconductor (MFIS) memory device, as well as a method for forming the MFIS memory device. According to some embodiments of the MFIS memory device, a lower source/drain region and an upper source/drain region are vertically stacked. A semiconductor channel overlies the lower source/drain region and underlies the upper source/drain region. The semiconductor channel extends from the lower source/drain region to the upper source/drain region. A control gate electrode extends along a sidewall of the semiconductor channel and further along individual sidewalls of the lower and upper source/drain regions. A gate dielectric layer and a ferroelectric layer separate the control gate electrode from the semiconductor channel and the lower and upper source/drain regions.