Device for cleaning a surface in the interior of an optical system

The present invention relates to a device for cleaning a surface (302, 402) in the interior of an optical system (300, 400), in particular of an EUV lithography system, comprising a rod-shaped element (303, 403), wherein the rod-shaped element comprises a visualization unit (304, 404) configured to...

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Bibliographische Detailangaben
Hauptverfasser:	SIGEL, BENJAMIN, PETASCH, THOMAS, DIESCH, JOVANA-MARIA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS TESTING
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Beschreibung
Zusammenfassung:	The present invention relates to a device for cleaning a surface (302, 402) in the interior of an optical system (300, 400), in particular of an EUV lithography system, comprising a rod-shaped element (303, 403), wherein the rod-shaped element comprises a visualization unit (304, 404) configured to visualize contaminates (320, 420) on the surface, and a cleaning unit (305, 405) configured to remove contaminates from the surface, and a distance sensor (306, 406), wherein the distance sensor is configured in such a way as to measure the distance between the surface and the end of the rod-shaped element, and a connection element (307, 407) configured in such a way that it can be secured at an opening (211, 311, 411) of the optical system, and wherein the connection element comprises a guide element (308, 408), with the aid of which the rod-shaped element (303, 403) can be guided. The invention further relates to the use of the device for cleaning a surface in the interior of an optical system, and to a method fo