Probe systems for optically probing a device under test and methods of operating the probe systems

Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support...

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Bibliographische Detailangaben
Hauptverfasser:	RISHAVY, DANIEL, FRANKEL, JOSEPH GEORGE, SIMMONS, MICHAEL E, NEGISHI, KAZUKI, CHRISTENSON, ERIC ROBERT
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	GYROSCOPIC INSTRUMENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SURVEYING TESTING
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Beschreibung
Zusammenfassung:	Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.