Front opening unified pod (FOUP) cleaning device comprising a snorkel nozzle that is fed with drying air for efficiently drying the snorkel nozzle

An objective of the present invention is to provide a front opening unified pod (FOUP) cleaning device capable of improving the cleanliness and drying efficiency of a FOUP body and a FOUP cover and also improving the drying efficiency of a snorkel nozzle. To realize such an objective, the present invention is a cleaning device for an FOUP comprising a FOUP body and a FOUP cover and is characterized in that the FOUP body is provided with a snorkel nozzle made of a foamed porous material for purging the interior of the FOUP body and comprises a cleaning chamber for using a cleaning fluid to clean the FOUP body and the FOUP cover. The cleaning chamber is provided with a compressed dry air supply part that introduces compressed dry air into the snorkel nozzle after the cleaning of the FOUP body is completed. The cleaning chamber comprises: a stopper that is arranged such that a driving shaft can be rotated. The shaft supports one side of the FOUP body to prevent the FOUP body from moving as being pushed aside by