Substrate processing apparatus can process substrates of different sizes in one apparatus
The purpose of the present invention is to provide a substrate processing apparatus. The substrate processing apparatus can process substrates of different sizes in one apparatus without the need of component replacement time and the preparation time for the apparatus to start up, thereby the improv...
Gespeichert in:
| Hauptverfasser: | , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | chi ; eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| Zusammenfassung: | The purpose of the present invention is to provide a substrate processing apparatus. The substrate processing apparatus can process substrates of different sizes in one apparatus without the need of component replacement time and the preparation time for the apparatus to start up, thereby the improving process efficiency of the substrate processing apparatus. The substrate processing apparatus implemented in the present invention includes: a substrate supporting pin for supporting the bottom surface of the substrate, and at least two substrate placing portions formed for placing substrates of different sizes. |
|---|