An apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure

An apparatus for fabricating a semiconductor structure and method of fabricating a semiconductor structure

The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edg...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOAI, KEITH KUANG-KUO, CHEN, HSIN-LIANG, WANG, WENIH, LIU, SHIH-KUO
Format: Patent
Sprache:chi ; eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present disclosure provides an apparatus for fabricating a semiconductor structure, including a chuck, an edge ring surrounding the chuck, wherein the edge ring comprises a cavity, a focus ring adjacent to an edge of the chuck and over the edge ring, and a first actuator in the cavity of the edge ring and engaging with the focus ring.