Processing information management system and method for managing processing information

Embodiments relate generally to a processing information management system and a method for managing processing information. According to one embodiment, a processing information management system includes: an abnormality analyzer configured to generate abnormality occurrence data of a target wafer...

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Hauptverfasser:	KAWAMURA, KENTA, SAEKI, HIDEKAZU
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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