Processing information management system and method for managing processing information

Embodiments relate generally to a processing information management system and a method for managing processing information. According to one embodiment, a processing information management system includes: an abnormality analyzer configured to generate abnormality occurrence data of a target wafer...

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Bibliographische Detailangaben
Hauptverfasser: KAWAMURA, KENTA, SAEKI, HIDEKAZU
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Embodiments relate generally to a processing information management system and a method for managing processing information. According to one embodiment, a processing information management system includes: an abnormality analyzer configured to generate abnormality occurrence data of a target wafer based on processing location information, the processing location information collected based on a first sensor outputting a first sensor signal according to a detected processing state, the first sensor provided in a wafer processing apparatus; and an integration system configured to integrate the abnormality occurrence data into wafer map data corresponding to the target wafer.