MEMS acoustic sensor

Provided is a MEMS acoustic sensor comprising a substrate comprising a cavity, a back plate supported on the substrate and comprising a plurality of through-holes, at least one anchor projecting from the back plate toward the substrate, and a diaphragm supported by the at least one anchor and deform...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	JUNG, KYU-DONG, SONG, CI-MOO, KIM, YONG-KOOK, SHAH, MUHAMMAD ALI, YOUN, KEUN-JUNG, LEE, SANG WOO
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	DEAF-AID SETS ELECTRIC COMMUNICATION TECHNIQUE ELECTRICITY LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS PUBLIC ADDRESS SYSTEMS
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Provided is a MEMS acoustic sensor comprising a substrate comprising a cavity, a back plate supported on the substrate and comprising a plurality of through-holes, at least one anchor projecting from the back plate toward the substrate, and a diaphragm supported by the at least one anchor and deformed by a sound wave introducing from the outside through the cavity, wherein no part of the deformed diaphragm comes into contact with the substrate.