Large-size thin-film deposition substrate and method for manufacturing same, segmented thin-film deposition substrate and method for manufacturing same, and production management method and production management system thereof

Provided is a method for manufacturing a large-size thin-film deposition substrate with which it is possible to reduce manufacturing costs of a large-size thin-film deposition substrate and segmented thin-film deposition substrates which include identification marks, and to improve precision in read...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: ASATANI, TSUYOSHI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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