Vaporizer

In order to achieve high-temperature heating of a liquid raw material, provided is a vaporizer for which adhesion between a metal inner heater block and a heat-resistant glass inner tube has been improved and heat conductance from an inner heater has been improved. A vaporizer (A) comprises an atomi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: FURUKADO, TATSUHIKO, ONO, HIROFUMI
Format: Patent
Sprache:chi ; eng
Schlagworte:
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