Vaporizer

In order to achieve high-temperature heating of a liquid raw material, provided is a vaporizer for which adhesion between a metal inner heater block and a heat-resistant glass inner tube has been improved and heat conductance from an inner heater has been improved. A vaporizer (A) comprises an atomi...

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Bibliographische Detailangaben
Hauptverfasser:	FURUKADO, TATSUHIKO, ONO, HIROFUMI
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FILLING VESSELS WITH, OR DISCHARGING FROM VESSELS, COMPRESSED,LIQUEFIED, OR SOLIDIFIED GASES FIXED-CAPACITY GAS-HOLDERS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY SEMICONDUCTOR DEVICES STORING OF DISTRIBUTING GASES OR LIQUIDS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION VESSELS FOR CONTAINING OR STORING COMPRESSED, LIQUEFIED ORSOLIDIFIED GASES WEAPONS
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Beschreibung
Zusammenfassung:	In order to achieve high-temperature heating of a liquid raw material, provided is a vaporizer for which adhesion between a metal inner heater block and a heat-resistant glass inner tube has been improved and heat conductance from an inner heater has been improved. A vaporizer (A) comprises an atomizer, a vaporizer body (Ah), and a heating unit (Ak). The heating section (Ak) comprises an inner heater block (3) and an inner heater (9). An inner tube (2) is made of heat-resistant glass and has an external diameter less than the internal diameter of the vaporizer body (Ah), which is hollow. The inner heater block (3) comprises: divided bodies (31-3n), divided along the central axis (CL) thereof; and an elastic material (8). The elastic material (8) is disposed between the divided bodies (31-3n) and works so as to press and bias the divided bodies (31-3n) in the direction of separation, thereby causing same to press on an inner peripheral surface of the inner tube (2). Inner heaters (91-9n) are embedded respectiv