Cabinet for solid material container

To provide a cabinet for a solid material container, with which a solid material container inside the cabinet can be cooled quickly, and with which the time required for work to exchange the solid material container in the cabinet can be reduced. A cabinet 2 is provided with: a main body having a to...

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Bibliographische Detailangaben
1. Verfasser:	KOURA, TERUMASA
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	To provide a cabinet for a solid material container, with which a solid material container inside the cabinet can be cooled quickly, and with which the time required for work to exchange the solid material container in the cabinet can be reduced. A cabinet 2 is provided with: a main body having a top wall 21, a side wall 23, and a bottom wall 22; a door 231 which is attached to a portion of the main body, for putting in and taking out a solid material container 5; an exhaust duct 25 attached to the top wall 23; a heating portion for heating the solid material container 5; a temperature sensor for measuring a temperature of the heating portion; and a cooling blower 3 for blowing cooling air toward the solid material container 5.