Substrate positioning device and electron beam inspection tool

An object positioning device, comprising: an object support configured to support an object, an actuator, in use configured to move the object support in a substantially horizontal plane, arranged to apply a force to the object support in a force direction, wherein the force direction is pointing ou...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	KOOIKER, ALLARD EELCO, HUINCK, JEROEN GERTRUDA ANTONIUS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS
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Beschreibung
Zusammenfassung:	An object positioning device, comprising: an object support configured to support an object, an actuator, in use configured to move the object support in a substantially horizontal plane, arranged to apply a force to the object support in a force direction, wherein the force direction is pointing out of the horizontal plane.