Integrated laser voltage probe pad for measuring DC or low frequency AC electrical parameters with laser based optical probing techniques

A semiconductor or integrated circuit block including a sense node and a converter circuit, in which the sense node develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit converts the low frequ...

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Hauptverfasser: KERVER, HARRY BERNARDUS ANTONIUS, NIEROP, PIETER GUSTAAF, BOON, GERBEN
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creator KERVER, HARRY BERNARDUS ANTONIUS
NIEROP, PIETER GUSTAAF
BOON, GERBEN
description A semiconductor or integrated circuit block including a sense node and a converter circuit, in which the sense node develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit converts the low frequency electrical parameter into an alternating electrical parameter having a frequency at or above the predetermined frequency level sufficient to modulate a laser beam focused within a laser probe area of the converter circuit. The converter may include a ring oscillator, a switch circuit controlled by a clock enable signal, a capacitor having a charge rate based on the low frequency electrical parameter, etc. The laser probe area has a frequency level based on a level of the low frequency electrical parameter to modulate the reflected laser beam for measurement of the electrical parameter by a laser voltage probe test system.
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language chi ; eng
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subjects MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
TESTING
title Integrated laser voltage probe pad for measuring DC or low frequency AC electrical parameters with laser based optical probing techniques
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