Integrated laser voltage probe pad for measuring DC or low frequency AC electrical parameters with laser based optical probing techniques

A semiconductor or integrated circuit block including a sense node and a converter circuit, in which the sense node develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit converts the low frequ...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KERVER, HARRY BERNARDUS ANTONIUS, NIEROP, PIETER GUSTAAF, BOON, GERBEN
Format: Patent
Sprache:chi ; eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor or integrated circuit block including a sense node and a converter circuit, in which the sense node develops a low frequency electrical parameter that is constant or varies at a frequency below a predetermined frequency level, and in which the converter circuit converts the low frequency electrical parameter into an alternating electrical parameter having a frequency at or above the predetermined frequency level sufficient to modulate a laser beam focused within a laser probe area of the converter circuit. The converter may include a ring oscillator, a switch circuit controlled by a clock enable signal, a capacitor having a charge rate based on the low frequency electrical parameter, etc. The laser probe area has a frequency level based on a level of the low frequency electrical parameter to modulate the reflected laser beam for measurement of the electrical parameter by a laser voltage probe test system.