Split double sided wafer and reticle clamps

An electrostatic clamp and a method for fabricating the same is disclosed. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the cla...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: PEREZ-FALCON, VICTOR ANTONIO, MONKMAN, ERIC JUSTIN, LIPSON, MATTHEW
Format: Patent
Sprache:chi ; eng
Schlagworte:
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