Split double sided wafer and reticle clamps
An electrostatic clamp and a method for fabricating the same is disclosed. The electrostatic clamp includes a first stack and a second stack, wherein the first stack is joined with the second stack. Each of the first and second stacks includes a clamp body, one or more electrodes disposed on the cla...
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Format: | Patent |
Sprache: | chi ; eng |
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