Automatic optical detection mechanism for detecting silicon wafer defects and method thereof

An automatic optical detection mechanism for detecting silicon wafer defects and method thereof are provided. The detection mechanism includes a base, an illumination unit, an image capturing unit, and an image identification unit. A target silicon wafer is placed on the base. The illumination unit provides the light needed for illuminating the silicon wafer, and the image capturing unit captures a target image from the surface of the silicon wafer. The image identification unit receives the target image and identifies the abnormal parts in the image as defects. Therefore, the present invention automatically detects the defects of the silicon wafer.