Deposition method at atmospheric pressure
A deposition method at an atmospheric pressure is described. In this method, a target is provided. The target is gasified by using laser to form steam of the target. The steam of the target is guided to a surface of a work piece by using an air stream to deposit the steam onto the surface of the wor...
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Format: | Patent |
Sprache: | chi ; eng |
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Zusammenfassung: | A deposition method at an atmospheric pressure is described. In this method, a target is provided. The target is gasified by using laser to form steam of the target. The steam of the target is guided to a surface of a work piece by using an air stream to deposit the steam onto the surface of the work piece. |
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