Deposition method at atmospheric pressure

A deposition method at an atmospheric pressure is described. In this method, a target is provided. The target is gasified by using laser to form steam of the target. The steam of the target is guided to a surface of a work piece by using an air stream to deposit the steam onto the surface of the wor...

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Bibliographische Detailangaben
Hauptverfasser: WANG, CHAOUN, HSU, YI-MING
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:A deposition method at an atmospheric pressure is described. In this method, a target is provided. The target is gasified by using laser to form steam of the target. The steam of the target is guided to a surface of a work piece by using an air stream to deposit the steam onto the surface of the work piece.