Method of manufacturing hydrogen sensor with calcium-doped zinc oxide nanopillar including a providing step, a seed layer forming step, a growth solution preparation step, and a nanopillar forming step

A method of manufacturing a hydrogen sensor with calcium-doped zinc oxide nanopillars includes a providing step, a seed layer forming step, a growth solution preparation step, and a nanopillar forming step. The providing step is to provide a semiconductor substrate with contact electrodes. The seed...

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Bibliographische Detailangaben

Hauptverfasser:	LIN, TIENAI, HUANG, WENANG, TSAI, PO-TSUNG, HUANG, TAI-HSIANG, LIOU, MENG-JIE
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	CHEMISTRY COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F INORGANIC CHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OR TREATMENT OF NANOSTRUCTURES MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES MEASURING METALLURGY NANOTECHNOLOGY PERFORMING OPERATIONS PHYSICS SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES TESTING TRANSPORTING
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