Method of manufacturing hydrogen sensor with calcium-doped zinc oxide nanopillar including a providing step, a seed layer forming step, a growth solution preparation step, and a nanopillar forming step

A method of manufacturing a hydrogen sensor with calcium-doped zinc oxide nanopillars includes a providing step, a seed layer forming step, a growth solution preparation step, and a nanopillar forming step. The providing step is to provide a semiconductor substrate with contact electrodes. The seed layer forming step is to form a zinc oxide seed layer on the semiconductor substrate by sputtering. The growth solution preparation step is to mix and stir zinc acetate, hexamethylenetetramine, deionized water, and calcium chloride with a predetermined concentration to form a growth solution. The nanopillar forming step is to immerse the semiconductor substrate with the zinc oxide seed layer in the growth solution and then heating, so that the zinc oxide seed layer form calcium-doped zinc oxide nanopillars.