Monitoring process wall depositions and coatings

Various embodiments include apparatuses and methods using the apparatus. In one embodiment, the apparatus includes an adsorption sensor having a light source, and at least a first transparent-window and a second transparent-window mounted on substantially opposing walls in a process chamber through...

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Bibliographische Detailangaben
Hauptverfasser:	ALBAREDE, LUC, RUAN, LING-YAN, SILADIE, CRISTIAN
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING METALLURGY PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING
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Beschreibung
Zusammenfassung:	Various embodiments include apparatuses and methods using the apparatus. In one embodiment, the apparatus includes an adsorption sensor having a light source, and at least a first transparent-window and a second transparent-window mounted on substantially opposing walls in a process chamber through which radiation from the light source traverses. The first windows are selected to be substantially transparent at one or more wavelengths emitted by the light source. A light-source detector is configured to receive radiation transmitted through the second transparent-window and provide an intensity level of the received radiation that includes transmission losses through the first transparent-window and the second transparent-window due to adsorbed films on the windows. Other apparatuses and systems are disclosed.