Turbomolecular vacuum pump and purge method

The subject of the present invention is a turbomolecular vacuum pump (1) comprising a purge gas injection device (21) comprising at least one canal (20) formed in the stator (2) and opening out between the rotor (3) and the stator (2), so as to inject a purge gas into the path followed by the pumped...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	DENGREVILLE, ANTOINE, VARENNES, NICOLAS
Format:	Patent
Sprache:	chi ; eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING NON-POSITIVE DISPLACEMENT PUMPS POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS WEAPONS
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Beschreibung
Zusammenfassung:	The subject of the present invention is a turbomolecular vacuum pump (1) comprising a purge gas injection device (21) comprising at least one canal (20) formed in the stator (2) and opening out between the rotor (3) and the stator (2), so as to inject a purge gas into the path followed by the pumped gases, downstream of at least one blades stage (9) of the rotor (3), the purge gas injection device (21) being configured so that the injected purge gas flow rate is below a threshold that is determined so that the difference between the pressure on the suction side (6) without the injection of the purge gas and with the injection of a purge gas, is less than 0.066 Pa. The invention also relates to a purge method and to a turbomolecular vacuum pump (1).