Processing device including a chuck platform, a processing means, a cassette, a cassette carrying portion, a moving-out means, a temporary storage means, and a conveying means

Provided is a processing device, which does not have problems moving the processed object out of a cassette or transporting the processed object in the processing device or damaging the processed object. The processing device (2) comprises, as constituent elements, at least: a chuck platform (4) cap...

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Bibliographische Detailangaben
Hauptverfasser: MANNAMI, HIDETOSHI, KAWAGOE, DAISUKE, EBISU, SHOGO
Format: Patent
Sprache:chi ; eng
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Beschreibung
Zusammenfassung:Provided is a processing device, which does not have problems moving the processed object out of a cassette or transporting the processed object in the processing device or damaging the processed object. The processing device (2) comprises, as constituent elements, at least: a chuck platform (4) capable of selectively holding at least two sizes of the processed objects , a processing means (6) that is capable of processing the processed objects held by the chuck platform (4), a cassette carrying portion (10) for carrying a cassette (8) that accommodate a plurality of processed objects, a moving-out means (12) for moving the processed objects from the cassette (8) carried by the cassette carrying portion (10), a temporary storage means (14) for the temporary storage of the processed objects moved out by the moving-out means (12), and a conveying means (16) that conveys the processed objects temporarily stored in the temporary storage means (14) toward the chuck platform (4). The processing device further (2) i